Abstract
IN this communication, results obtained by cathodic sputtering of iron oxide cathodes, when the sputtering atmosphere is residual air, are presented. Preston1 prepared oxide films of metals by reactive sputtering in an atmosphere of oxygen, but this is the first time that results on the sputtering, directly, of magnetite (Fe3O4) and hæmatite (α-Fe2O3) have been reported.
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References
Preston, J. S., quoted in Holland, L. Vacuum Deposition of Thin Films, 456 (Chapman and Hall, 1956).
Banerjee, S. K., Ph.D. dissertation Camb. Univ., 1963 (unpublished).
Moulton, C., Nature, 195, 793 (1962).
Wehner, G., Phys. Rev., 102, 690 (1956).
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BANERJEE, S. Cathodic Sputtering of Iron Oxides. Nature 202, 1098 (1964). https://doi.org/10.1038/2021098b0
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DOI: https://doi.org/10.1038/2021098b0
