Figure 8

DFT calculations demonstrating that the Ru clusters prefer the b planes (a) over the c planes of C49 TiSi2 (b). The prediction is consistent with the experimental observations by TEM from the top (c), where b planes are parallel to the viewing direction. Inset: size distribution of the Ru nanoparticles by a 100-cycle ALD growth. When viewed from the side (d), where b planes are perpendicular to the viewing direction, no Ru nanoparticles are seen on the c or a planes. Inset: high-resolution TEM confirming the crystalline nature of the Ru nanoparticles.58 Copyright 2014, American Chemical Society.