Figure 5
Microstructural analysis of h-BN film using TEM. (a) Schematic image of the SAED mapping analysis. (b) SAED image of a h-BN film from a single spot, and overlaid SAED mapping images from 16 SAED patterns over a 0.3 × 0.3 mm2 area and 9 SAED patterns over a 0.9 × 0.9 mm2 area. (c) Schematic illustration of the TEM-EBSD analysis, which is used to visualize the real-space crystal structure. (d) TEM-EBSD IPF maps of h-BN film in normal direction (ND) and transverse direction (TD). (e) HR-TEM image of h-BN film. FFT image is shown in the inset. EBSD, electron back-scattered diffraction; FFT, fast-Fourier-transformed; h-BN, hexagonal boron nitride; HR, high resolution; IPF, inverse pole figure; SAED, selective area electron diffraction; TEM, transmission electron microscopy.
