Figure 13

Conceptual diagram of a tunable absorption filter for LWIR microbolometers. The device can continuously tune the absorption resonance and switch between two finesse states. The IR absorber is deposited on the top of the upper plate. The bottom DBR mirror has reflectivity centered at 10 µm. The primary actuation electrodes are on the support beams and substrate to delay snap-through and enhance tuning range.²⁴ LWIR, long-wave infrared; DBR, distributed bragg reflector.