Figure 2 | Light: Science & Applications

Figure 2

From: Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

Figure 2

(a) 3D spherical micromirror fabrication steps. (b) A SEM image for a fabricated fiber groove/3D mirror structure. (c) SEM images focused on the fabricated 3D micromirror in which the achieved out-of-plane and in-plane radii of curvature are approximately 100 µm and 200 µm, respectively. The effect of post-etching smoothing is shown in (d), where the peak-to-peak roughness is reduced sixfold. (e) A schematic illustration of possible extension leading to an SOI optical bench containing the presented 3D mirror monolithically integrated with a MEMS actuator and a fiber groove. (f) A side view of the moving parts with the sacrificial BOX layer etched while the fixed parts remain anchored. BOX, buried oxide; 3D, three-dimensional; SEM, scanning electron microscope; SOI, silicon on insulator.

Back to article page