Figure 7
Measured power coupling efficiency of the presented 3D spherical micromirror with an in-plane radius of curvature of 200 µm and an out-of-plane radius of curvature of 100 µm. For reference, the power coupling efficiencies were also measured on a cylindrical micromirror with an in-plane radius of curvature of 150 µm and on a flat micromirror. The coupling efficiency is depicted in (a) for measurements performed at a wavelength of 675 nm and in (c) for measurements performed at a wavelength of 1550 nm. Their corresponding theoretical model data are depicted in (b) and (d), respectively. 3D, three-dimensional.
