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Figure 1

From: Thermally reconfigurable quantum photonic circuits at telecom wavelength by femtosecond laser micromachining

Figure 1

Femtosecond laser microfabrication process. (a) Direct writing of Mach-Zehnder interferometers in the bulk of a borosilicate slide. (b) After gold coating the sample top surface, the resistors are patterned by ablation using the same femtosecond laser. Accurate alignment (∼1 µm) between the resistors and the Mach-Zehnder arms is achieved by using the reference markers inscribed on the glass surface together with the interferometers.

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