Figure 1
From: Directly patterned substrate-free plasmonic “nanograter” structures with unusual Fano resonances
Schematic diagrams illustrating the steps in the fabrication of spatially oriented 3D nanostructures. (a) The gold thin film deposited on the photoresist-coated Si substrate. (b) The floating Au film after the photoresist was dissolved. (c) The Cu grid with a mesh area of 100 µm × 100 μm. (d) The Au thin film on the Cu grid obtained after film transfer. (e) 2D nano-patterns formed by FIB milling on suspended Au films. (f) Spatially oriented 3D nanostructures realized by in situ FIB irradiation-induced folding.
