Figure 12
From: Ultrafast laser processing of materials: from science to industry
Optical setup with two SLMs for independent control of the wave front tilt and polarization. HWP, QWP and SLM phase masks allows an arbitrary control of the polarization and wave front tilt. SEM images of the single-pass scan ablation of indium tin oxide with adjacent lines polarized differently. Reproduced with permission from Ref. 169. Taylor & Francis Ltd, http://www.tandfonline.com. All rights reserved.
