Figure 3
Atomically thin micro-lens fabricated from a few layers of MoS2. (a) PSI image of an atomically thin micro-lens fabricated on a 9L MoS2 flake. (b) Schematic plot of the micro-lens structure. The bowl-shaped structure of the micro-lens was fabricated by FIB milling with atomic resolution in the vertical direction and sub-20 nm resolution in lateral direction. (c) Measured OPL values versus position for the direction indicated by the dashed line in (a). (d) Measured statistical data of the OPL values for MoS2 flakes with different layers ranging from 1L to 11L. For each layer number of MoS2, at least five different samples were characterized in the statistical measurements. All the layer numbers were confirmed by AFM. (e) Intensity distribution pattern of the MoS2 micro-lens measured by scanning optical microscopy (SOM). (f) Intensity distribution pattern of the planar reference SiO2/Si substrate measured by the same SOM setup.
