Figure 6

MEMS pressure sensor for intracellular pressure measurement. Reproduced with permission from Ref. 116. (a) Sensor schematic. (b) SEM image of a fabricated device. (c) MEMS pressure sensor internalized into the cytoplasm of a HeLa cell. Top left: transmitted visible light image. Top right: overlay of confocal images. Bottom: orthogonal projection of confocal images showing that the device is inside the cell.