Figure 3
Target resonant modes for Type D actuators: (a) Type D1 and (b) Type D2. The different points of attachment of the paddles to the strip result in different paddle vibration modes.
Figure 3 | Microsystems & Nanoengineering
Target resonant modes for Type D actuators: (a) Type D1 and (b) Type D2. The different points of attachment of the paddles to the strip result in different paddle vibration modes.
