Figure 1
From: Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
Fatigue test specimens. Bird’s-eye view SEM pictures are shown for (a) fan-shaped resonator and (b) notched specimen. Configuration of specimens on the photomask and corresponding crystal orientations on {100} and {110} silicon wafers are illustrated in (c). SEM pictures of the sidewall around the notch are shown in (d) currently and (e) previously fabricated specimens.
