Figure 4
From: Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
Finite element stress simulation. Finite element models under static deflection are shown in (a) and (b) for coarse model including the whole resonator. The submodel covering only the vicinity of the notch tip is shown in (c). Contour plots of the calculated first principal stress distribution around the notch tip are shown for types (d) FR, (e) FT, (f) GU, (g) GR, and (h) GS under 1° deflection with the common legend indicated at the bottom. Profiles of the first principal stress distribution along the notch tip are shown in (i) where the position is indicated by angles as shown in the inset.
