Figure 10 | Microsystems & Nanoengineering

Figure 10

From: Heterogeneous 2D/3D photonic integrated microsystems

Figure 10

Stacking of multiple 2D layers for arbitrary waveform shaping. (a) Stacked device consisting of Layers 1–5. (b) Fabricated three-layer silicon nitride/silicon dioxide OAM device. Image of the three-layer silicon nitride/silicon dioxide OAM device when the (c) bottom (Layer 1), (d) middle (Layer 2), and (e) top (Layer 3) are illuminated. The optical waveguide propagation loss value was approximately 0.3 dB cm−1. OAM, orbital-angular momentum; 2D, two dimensional.

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