Figure 7 | Microsystems & Nanoengineering

Figure 7

From: Heterogeneous 2D/3D photonic integrated microsystems

Figure 7

(a) 16×16 3D waveguide design utilizing a routing algorithm that maintains the same photonic path lengths, the minimum radius of curvature, and the minimum inter-waveguide distance, (b) a photograph of the fabricated 16×16 3D waveguides observed at the output facet. (c) Magnified micrograph of a portion of the 256 input waveguides. 3D, three dimensional.

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