Figure 2
From: Electron-beam lithography for polymer bioMEMS with submicron features
Micrographs of submicron metal structures pattern on Parylene C. (a) Squares of decreasing size (5–0.25 μm) patterned to determine the smallest resolvable feature. (b) Released Parylene film with encapsulated submicron structure spanning larger metal traces; Straight 0.25 μm Ti trace. (c) Straight 2.5 μm Ti trace. (d) Serpentine 0.4 μm trace (0.4 μm spacing). (e) Serpentine 5 μm trace (5 μm spacing). (f) Serpentine 0.4 μm trace (0.4 μm spacing). Parylene C, poly(chloro-p-xylylene); SEM, scanning electron microscope.
