Figure 1
From: Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales
Microsystem for testing the transfer of motion through an assembly of parts at microradian and nanometer scales. (a) Bright-field micrograph showing a microelectromechanical linkage with a translating link coupling through a pin-in-slot joint to a rotating link on a pivot. The red rectangle denotes the region of interest in (b and c). (b) Bright-field micrograph showing the region of interest. A dark etch hole ā2āĪ¼m in diameter is visible near the center of the image. (c) Fluorescence micrograph showing fluorescent nanoparticles labeling the same region of interest. Changes in the position of the centroid and the orientation of either the etch holes or the fluorescent nanoparticles indicate the underlying motion of the rotating link.
