Figure 2 | Microsystems & Nanoengineering

Figure 2

From: Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Figure 2

Measurement and analysis of the electrothermal actuation of the linkage. (a) Scatterplot showing that a third-order polynomial empirically models the displacement of the translating link D in response to the square of the voltage applied to the electrothermal actuator v2. Dashed gray lines indicate electromechanical characteristics of the joint pertaining to play. (b) Scatterplot showing that a piecewise quadratic function empirically models the rotation of the rotating link Īø in response to v2. Play in the joint results in hysteretic motion of the rotating link. The horizontal-axis intercept of the response function for section 2 of the hysteresis loop gives vmin. For an input of this value, the model in (a) outputs D play 0 . Uncertainties are smaller than the data markers.

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