Figure 3
From: Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Measurement and analysis of the mechanical kinematics of the linkage. (a) Scatterplot showing a direct comparison of the motion of the translating and rotating links, isolating the kinematics of the linkage. The black line in section 2 is a fit to Equation (2), determining the value of . The black line in section 4 is a plot of Equation (4). The uncertainties are smaller than the data markers. (b) Schematic showing the linkage kinematics for sections 1 and 2, and Equation (2). (c) Schematic showing the linkage kinematics for section 4 and Equation (4). (d) Schematic showing the maximum angular play in the rotation of the rotating link while the links are decoupled. (e) Scatterplot showing the predicted values of Dplay(D) based on the determined value of . (f) Scatterplot showing the predicted values of Īøplay(D) based on the determined value of . The vertical bars in (e and f) are 1 s.d.