Figure 5 | Microsystems & Nanoengineering

Figure 5

From: Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Figure 5

Input voltages with submillivolt noise result in a deterministic output. (a–c) Measurement series, histograms and scatterplots showing the local response of Δθ to changes in Ī”(v2) at nominal voltage values of 4.5 V, 7.5 V and 9.5 V, respectively. Input voltages with submillivolt noise result in rotational outputs that are deterministic within measurement uncertainty. (d) Scatterplot showing the global response of Δθ to changes in Ī”(v2) with a fit to the response function as a green line. The vertical bars for values of Δθ are empirical uncertainties that the main text describes. The vertical bars for values of Ī”(v2) are uncertainties that the instrument manufacturer specifies. The small scatterplots in (a–c) show representative uncertainties in the upper left corners.

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