Figure 7
From: Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales
Asymmetric interaction between input noise and joint play degrades the rotational output of the microsystem. Inset: schematic illustrating the effects of noise on the coupling and decoupling of the links. Main panel: scatterplot comparing data and fits that show these effects. The black points are data from actuation of the linkage with an input voltage with submillivolt noise and the green line is the fit of the response function to the global set of data. The narrow scatter of the black points results primarily from measurement uncertainty. The gray points are data from actuation of the linkage with an input voltage with millivolt noise and the blue line is the fit of the response function to the global set of data. The red line is a fit of a linear function to only the local data with millivolt noise. The wide scatter of the gray points includes the effects of input noise and joint play, resulting in a measured value of Ī(v2) that is always less than or equal to the true value that produced the measured rotation of the rotating link. The effect of this scatter is evident as a shift from the green line to the blue line, and a reduced slope of the red line. The vertical bars are empirical uncertainties that the main text describes. The horizontal bars are the uncertainties specified by the instrument manufacturer.
