Figure 6

SEM images of the fabricated masters using the 2PP method. (a) HAR nanostructures (an AR of 28, d=5 μm) obtained by 2-photon polymerization (2PP)-direct laser write (DWL). (b) Combination of micro and nanosized structures featuring photonic nanofences (d=n.a., 25, 16.7, and 10 μm). (c) Long nanostructure (500 μm) showing the write field limits and a slight stitching error. (d) Replicated (trench) structure from the 2PP master into UV-curable polydimethyl siloxane (d=16.7, 10, and 5 μm) and (e) a larger magnification image showing the transition between micro- and nanostructures.