Figure 8 | Microsystems & Nanoengineering

Figure 8

From: High-aspect-ratio nanoimprint process chains

Figure 8

Ultraviolet-micromoulding into capillaries replicated PNFs in OrmoComp using (a) and (b) a cryo-etch silicon mould and (c) and (d) a UV-curable polydimethyl siloxane mould copied from a 2-photon polymerization (2PP)-direct laser write (DWL) master. Owing to the sealing between mould and substrate, the residual layer in c and d is negligible.

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