Figure 4
From: Hexagonal boron nitride nanomechanical resonators with spatially visualized motion
Spatially resolved resonance mode shapes of Device #3. (a) Optical microscopy image showing the corresponding areas of (b) optical interferometric mapping and (c) atomic force microscopy (AFM) scanning within the yellow and light-green outlined boxes, respectively. Scale bars are 10, 3, and 5 μm for a–c, respectively. (d) AFM traces of the device corresponding to the dashed lines in c showing an h-BN thickness of 30.46±0.39 nm. (e) Optical interferometry mapping of spatially resolved resonator motion for the 8 resonance modes. (f) COMSOL Multiphysics simulations for the shapes of different resonance modes with 20 MPa uniaxial pre-stress (1st row) and 143 nm center bulging (2nd row). The numbers indicate the correspondence of simulated mode shapes with measured ones.
