Table 1 Examples of micro-/nanoscale fabrication techniques for three-dimensional structures20–25
From: CAD/CAM for scalable nanomanufacturing: A network-based system for hybrid 3D printing
Process scale | Resolution | Geometric degree of freedom | Throughput | Process materials | |
|---|---|---|---|---|---|
Energy beam-based (FIB-chemical vapor deposition, and so on) | *** | ** | *** | ** | ** |
Liquid/aerosol-based (Electro-hydrodynamic-jet, ink-jet, and so on) | ** | * | ** | ** | *** |
Tip-based (Dip-pen nanolithography, and so on) | * | *** | ** | * | *** |
Imprinting/molding (Nanoimprint, hot embossing, and so on) | *** | *** | * | *** | * |
Machining (Ultra-precision machining, and so on) | ** | ** | *** | ** | *** |
Hybrid | *** | *** | *** | *** | *** |
