Extended Data Table 1 Residual aberrations in the STEM probe

From: Deciphering chemical order/disorder and material properties at the single-atom level

  1. Estimates of the residual aberration coefficients as measured by the aberration corrector software on a typical day preceding the ~6-hour experimental tilt series measurement. The 2-fold astigmatism was optimized manually by the operator during the tilt series to avoid issues with drift of the corrector lenses. All first-, second- and third-order aberration coefficients were tuned by the operator to be lower than the reported 95% measurement confidence reported by the software. Only one fourth-order coefficient (D4), a factory alignment not tuned by the operator, is reported as typically larger than the confidence error. Such values will produce the best possible probe size for this microscope, as reported in this Letter, based on geometrical estimates.
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