Figure 2: Evolution of coverage of C⊥ with e-beam dose. | Nature Communications

Figure 2: Evolution of coverage of C⊥ with e-beam dose.

From: Directed block copolymer self-assembly implemented via surface-embedded electrets

Figure 2

E-beam dose is controlled by changing irradiation area and time. Coverage of C⊥ is calculated by the area ratio of C⊥ in the whole irradiated region. The line is a fitted curve based on the scattered points. All experiments were conducted using a 16.9-pA beam current, a 5-kV accelerating voltage and PS(46k)-b-PMMA(21k) films with thickness of 37 nm.

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