Figure 6: Electromagnetic circuit model of the piezoelectric resonator.
From: Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing
A normally incident Transverse electromagnetic (TEM) wave impinges on the structure shown in Fig. 1. The outer transmission line sections represent the free space, ZMTS, is the surface impedance of the array of gold patches (metasurface), and the inner transmission line section takes into account the AlN dielectric and the ground platinum layer, respectively. Each section is characterized by its characteristic impedance Z and propagation constant β.
