Figure 4: Imaging of a zone-doubled Fresnel zone plate by CMI.
(a) Phase delay image stitched together from an array of 39 × 8 overlapping CMI reconstructions. The green yellow circles illustrate the overlap of two adjacent areas illuminated by the probe. (b) Enlarged single-shot CMI reconstruction of the circled region. (c) Enlarged image of the boxed region of a. (d) Top: a cross-section of the design: green, Si3N4 membrane; yellow, iridium coating; magenta, hydrogen silsesquioxane resist; the aspect ratio is not to scale. Bottom: red dots are phases of reconstructed pixels averaged vertically within the box in c; blue line is a linear fit; the nominal 30 nm-thick iridium coating is clearly revealed in the line profile.
