Figure 3: CPU sub-surface structure imaging in constant-height scanning mode. | Nature Communications

Figure 3: CPU sub-surface structure imaging in constant-height scanning mode.

From: Scanning superlens microscopy for non-invasive large field-of-view visible light nanoscale imaging

Figure 3

Comparison of (a) a conventional microscope mounted with a × 100 (numerical aperture=0.8) objective, (b) SEM, (c) AFM and (d) the SSUM for the observation of CPU sub-surface structures beneath a 10±2 nm (measured by AFM)-thick optically transparent film preventing AFM and SEM detection, which are denoted by il. (el) Local zoomed areas that correspond to the marked areas in ad. Scale bars, 5 μm (ad); 1 μm (el).

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