Figure 1: Resonant PEC tuning of GaAs disk resonators on a chip. | Nature Communications

Figure 1: Resonant PEC tuning of GaAs disk resonators on a chip.

From: Scalable high-precision tuning of photonic resonators by resonant cavity-enhanced photoelectrochemical etching

Figure 1

(a) Illustration of the resonant PEC etching of a disk resonator coupled to a linear optical waveguide. Laser light is in red while the shining zone represents a whispering gallery mode where electromagnetic energy localizes and triggers the cavity etching. The disk belongs to a set of three resonators immersed in a liquid droplet. (b) Side-view electron micrograph of a single GaAs disk positioned on top of a central AlGaAs pedestal. Scale bar 500 nm. (c) Set of two disks positioned along a common GaAs suspended optical waveguide. The waveguide’s tapered parts lie close to the disks while square-shape anchors support its widest part. Scale bar 2 μm. (d) Top-view electron micrograph of five disk resonators in series along a waveguide held by eight square anchors. Scale bar 10 μm.

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