Figure 1: Bragg ptychography experimental set-up and sample.
From: Three-dimensional high-resolution quantitative microscopy of extended crystals
(a) X-ray Bragg ptychography set-up including the FZP and its slit-defining aperture, the sample stage and the far-field 2D detector (The FZP central stop and the order sorting aperture have been omitted for clarity). The direct space frame (x, y, z) is chosen in the sample frame. (b) Sketch of the 3D intensity acquisition in Bragg geometry and the associated reciprocal space vectors q1, q2 and q3. (c) Scanning electron micrograph of the lines patterned on the Silicon-on-insulator substrate (Scale bar: 10 μm). The zoomed region (inset) emphasizes the area investigated during the ptychography scan. The translation direction tx is shown together with the two first illumination areas (white ellipses). (d) The same region as seen by atomic force microscopy.
