Figure 1: Device structure of the photonic crystal NW arrays mechanical resonator.
From: Low-concentration mechanical biosensor based on a photonic crystal nanowire array
(a) Schematic representation of device structure, with ordered vertical Si NW arrays on top of the Si/SiO2 (300 nm/200 nm) membrane. The outer surface of NWs on membrane region was coated with a thin Ti/Au (2 nm/3 nm) passivation layer (not shown here). (b) SEM image (40° side view) of the Si NW arrays, with 1.7 μm wire height, 100 nm wire base diameter, ~5 nm tip, at a 100 nm pitch. (c) SEM image (top view) of the NW arrays in b. The scale bars in b and c are 200 nm and 100 nm, respectively.
