Figure 2: Modelling the transfer of spatial information from the DNA templates to final graphene nanostructures.

(a,e) The boundary of the original DNA templates programmed with specific shapes (ring- and L-shape). (b,f) The transfer of DNA templates to the dry substrate (lithography step 1) distorts the dimensions due to environmental interactions, such as the partial dehydration and flattening of soft DNA structures. (c,g) The metallization on DNA template (lithography step 2) expands its size and increased the roughness of boundary. (d,h) The RIE etching and mask removal (lithography step 3 and 4) shrinks the dimensions of final graphene nanostructures as the plasma beam scattering in the lateral edges. The unit of length scale in all images is nm, and the height and distance of the modelled nanostructures and substrate surface are indicated by the colour gradients.