Figure 3: Raman characterizations.
Typical Raman spectra and the deconvolution of G bands of (a,e) graphene sheets with aforementioned DNA templates (lithography step 1), (b,f) graphene sheets with metallized DNA masks (lithography step 2), (c,g) after RIE etching (lithography step 3) and (d,h) graphene nanostructures after mask removal (lithography step 4). The overall statistical histograms of (i) integrated D band intensity, (j) G band position, (k) 2D band FWHM value and (l) I2D/IG value distribution of Raman spectra collected after each lithography step 1–4.
