Figure 3: Diffraction efficiency into silicon.

The diffraction efficiency was calculated with the RCWA. (a) Diffraction efficiency of a 600 nm period photonic crystal. (b) Diffraction efficiency of the 1,800 nm period quasi-random structure of Fig. 2c. (c) Diffraction efficiency of the quasi-random structure of Fig. 2c as a function of k-vector amplitude (x axis) and wavelength (y axis). (d) FDE is defined as the total amount of energy in all orders other than the 0 order. The FDE is not greatly affected by the type of pattern used. The spectra of (a,b) were calculated for an excitation wavelength of 600 nm and a groove depth of 100 nm. The white line represents the light line.