Figure 3: Transparent TFTs transferred on polyimide foil. | Nature Communications

Figure 3: Transparent TFTs transferred on polyimide foil.

From: Wafer-scale design of lightweight and transparent electronics that wraps around hairs

Figure 3

(a) Transparent TFTs have been fabricated by replacing metals with transparent ITO (Scale bar, 100 μm). (b) The devices are transferred on a polyimide foil. After the transfer wrinkles are observed in the ITO layer. The wrinkles were not present in the case of Ti/Au metallization (Fig. 2b) and they are due to built-in stress in the ITO film. (c) Devices bent to 10 mm (ε=0.25%). (d) Devices bent to 6 mm (ε=0.4%). (e) Transfer characteristic (VDS=0.1, 5 V) of a W/L=280 μm/60 μm transparent TFT, which is measured on Si, flat on polyimide after transfer and then bent to 10 and 6 mm (tensile strain parallel to the channel). Higher strain levels provoke cracks and delamination of the ITO. (f) Output characteristics for VGS=1, 1.5, 2 V of the device shown in e. (gi) The transfer yield is about 50% (10 devices out of 20 work after transfer). The most remarkable changes, after the transfer, are observed in the increase of the gate leakage, IG, ((i) plot in logarithmic scale) and of the off-current, Ioff, ((h) plot in logarithmic scale). Threshold voltage, VTH, remains, instead, stable and average mobility, μ, is of about 16 cm2 V−1s−1, which is lower than the Ti/Au metallization because of the increased contact resistance. Errors bars in the plots indicate the s.d.

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