Figure 1: Batch fabrication of single-crystal diamond nanocantilevers.
From: Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
(a) A roughly 3 × 3 × 0.03 mm3 single-crystal diamond plate is template-polished to a thickness uniformity <1 μm over the entire plate. (b) In the DOI approach, the plate is first wafer bonded using HSQ to form a DOI substrate. (c) Plate is thinned to 0.1–1 μm thickness by reactive ion etching, and cantilevers are patterned using optical lithography. (d) Cantilevers are released using conventional backside etching. (e) In the ‘quartz sandwich’ approach, cantilevers are first patterned using optical lithography. (f) Diamond plate is clamped between two fused quartz slides with an ~2 × 2 mm2 central aperture. (g) Exposed diamond plate is etched down until cantilevers become released. (h) Scanning electron micrograph of finished DOI devices. (i,j) Scanning electron micrographs of finished ‘quartz sandwich’ devices. Scale bars are 20 μm.
