Figure 4: Comparison of Q factors between nanomechanical resonators made from different materials.
From: Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
(a) Comparison of Q factors highlighting that for similar device dimensions, quality factors of single-crystal diamond are consistently higher by about an order of magnitude over single-crystal silicon devices. (b) Comparison of the geometry-independent dissipation parameter α (see Equation 3). Open symbols are 300 K values and filled symbols are ~4 K values. Dashed lines indicate linear thickness dependence of Q. Data sources: single-crystal diamond data are from this study. Silicon ~4 K data are from ref. 12 and references therein. Silicon 300 K data are from a ~1.3 μm-thick cantilever with Q~380,000 (Nanoworld, Arrow TL1Au), a ~70 nm thick cantilever with Q~8,200 (custom-made), and the 135 nm-thick silicon reference cantilever with Q~11,000 (Table 1). Polycrystalline diamond cantilever data are from refs 27, 49, 50, 51.
