Table 1 Mechanical properties for selected cantilevers.
From: Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
Material | Length | Width | Thickness * | ω c /2π | k c | Q (300 K) | Q (3 K) | F th (300 K) | F th (3 K) |
|---|---|---|---|---|---|---|---|---|---|
(μm) | (μm) | (nm) | (Hz) | (mN m−1) | (aN H z−1/2) | (aN H z−1/2) | |||
el-SCD | 240 | 12 | 280 (20) | 13,168 | 4.8 | 380,000 | 800,000 | 50 | 3.5 |
o-SCD | 120 | 12 | 100 (25) | 15,097 | 1.4 | 150,000 | 55,100 | 40 | 6.6 |
Si | 170 | 4 | 135 (5) | 4,960 | 0.083 | 11,500 | 31,500 | 63 | 3.8 |
PCD | 200 | 18 | 270 (5) | 14,197 | 5.0 | 6,680 | 22,000 | 370 | 21 |
el-SCD | 240 | 12 | 660 (20) | 32,140 | 67 | 412,000 | 1,510,000 | 115 | 6.0 (0.54†) |
