Figure 3: Fabrication of concentric square electrodes.
From: Sub-15-nm patterning of asymmetric metal electrodes and devices by adhesion lithography
(a–d) Schematic illustrating procedure for the fabrication of aligned concentric squares of Al and Au with a central square of Au, involving: first, deposition of Al (M1) in a ‘square-ring in square-ring’ geometry, followed by treatment with ODPA; second, deposition of a uniform layer of Au (M2) on top of the patterned Al and the exposed substrate; third, application of solution-deposited glue across the entire surface of the Au; and, fourth, removal of the glue to peel away unwanted parts of Au (that is, those lying above Al), leaving behind an in-plane concentric arrangement of Al and Au. (e–h) Photographs of the same four processing steps; substrate size is 20 × 20 mm. (i) Micrograph of resultant concentric square pattern; G1, G2 and G3 denote gaps between the two metals.
