Figure 1: SiC microdisk resonators—device structure, fabrication and measurement techniques.
From: Spatial mapping of multimode Brownian motions in high-frequency silicon carbide microdisk resonators
(a–c) Side view, aerial view and top view scanning electron micoscope images (colour enhanced) of the 500-nm-thick SiC microdisks supported by underneath 500-nm-thick SiO2 pedestal. Scale bars, 5 μm. (d) Illustration of the ‘microspectroscopy’ measurement enabled by the SiC-microdisk optical interferometry, in which wide-range frequency response is obtained while the ~1 μm laser spot is focused on a fixed location. (e) Illustration of the scanning ‘spectromicroscopy’ study where extensive measurements are performed focusing on a specific resonance mode, while the laser spot is scanning over the entire device surface.
