Figure 3: Spatial mapping of multimode thermomechanical (Brownian) vibrations of a 500-nm-thick SiC microdisk resonator (a=19.5 μm, b=3.8 μm).
From: Spatial mapping of multimode Brownian motions in high-frequency silicon carbide microdisk resonators
The spatial maps are generated by plotting the normalized thermomechanical motion amplitudes obtained from the scanning spectromicroscopy measurements, as functions of the laser spot positions (x, y) (μm). (a–e) Mapping data (on the left of each panel) and FEM computed mode shapes (on the right, both top and aerial views) for resonance modes 1–5 shown in Fig. 2, respectively. Red (blue) colour indicates larger (smaller) motion amplitude. (f) Resonance frequencies (f-values) for all these five modes versus the amount of pedestal off-centring (δ). Inset: Definition of device dimensions including the possible off-centring δ (exacerbated, to be visible). Curves: FEM calculation results. Symbols: Measured f-values of this device. Vertical dashed line indicates the determined pedestal off-centring amount, δ ≈0.4 μm.
