Figure 5: Multimode resonance frequency tuning capability by varying pedestal size and disk diameter.

Resonance frequencies are plotted as functions of b/a (the ratio between the pedestal and disk diameters). Data and analysis of multimode resonances scaling versus b/a for (a) six devices with a=19.5 μm and b=1.5, 3.3, 3.4, 3.7, 7.5 and 7.6 μm; and (b) five devices with a=29.5 μm and b=7.3, 12.5, 12.7, 17.4 and 17.6 μm. Curves: FEM computation results of multimode resonance scaling. Symbols: Experimental data. Different colours represent different mode shapes (see bottom legends). Data symbols and computed curves belonging to the same mode are assigned with the same colour. Examples of measured mode shapes demonstrated in Fig. 4 correspond to the data points inside the dotted line box here. Square symbols indicate resonance modes that appear to be affected by the device asymmetry (see top legends). The error bars for the b/a values represent the errors in estimating the device sizes, and are 0.03 for the 20-μm disks and 0.02 for the 30-μm devices.