Table 1 Working device yields of G/PBASE/G devices with various PBASE SAM growth time.
Growth time | Number of junctions | Number of shorts | Number of traces | Yield of junctions (%) |
---|---|---|---|---|
0 | 15 | 2 | 360 | 86.7 |
4 | 15 | 1 | 360 | 93.3 |
6 | 15 | 1 | 360 | 93.3 |
8 | 15 | 2 | 360 | 86.7 |
10 | 15 | 1 | 360 | 93.3 |
24 | 15 | 0 | 360 | 100 |
36 | 15 | 0 | 360 | 100 |