Figure 3: Atomic structure of MoS2 before and after DGU.

(a) Schematic illustration of the 2H semiconducting crystal structure of MoS2 shown from out-of-plane and perspective view (blue: Mo, brown: S). (b) Fast Fourier Transform of the STEM images. (c,d) HAADF-STEM images of MoS2 flakes before and after DGU, respectively. The inset image shows the magnified STEM image after DGU. The blue and brown spheres indicate the position of Mo and S atoms, respectively (scale bar, 0.5 nm).