Figure 3: Cross-sectional SEM images. | Nature Communications

Figure 3: Cross-sectional SEM images.

From: High electron mobility in thin films formed via supersonic impact deposition of nanocrystals synthesized in nonthermal plasmas

Figure 3

Cross-sectional SEM images of as-deposited ZnO nanocrystals on a silicon substrate (a) before and (b) after the nanocrystals have been coated with 7.2 nm of Al2O3 using ALD. Annealed ZnO nanocrystals on a silicon substrate before (c) and after (d) coating with 7.7 nm of ALD Al2O3 using ALD. (e) Shows a high angle annular dark field scanning transmission electron microscope (STEM) image of annealed ZnO nanocrystals coated with 7.7 nm Al2O3, corresponding to d. (f) Shows a STEM X-ray energy dispersion spectroscopy map of zinc (green) and aluminium (red) distribution in the area defined by the box in e. The scale bars in a–d are 500 nm, and e is 15 nm.

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