Figure 2: Experimental data of the thickness-dependent dielectric constant of MoS2.

The dielectric constant of MoS2 εMoS with (blue dots) and without (green dots) including interlayer capacitance is plotted as a function of thickness dMoS. εMoS increases from ~4ε0 for a monolayer to ~11ε0 for bulk MoS2. The errors originate from the measurements of sample sizes, thicknesses of MoS2 and BN, and capacitances of MoS2.