Figure 1: Grazing incidence reflectivity of fabricated torsional MEMS device.
From: X-ray photonic microsystems for the manipulation of synchrotron light
(a) The scanning electron microscopy image of the 500-μm × 500-μm MEMS device shows the reflective crystal surface, the comb-drive actuators and torsional flexures. Note the perspective angle of the image is about 60° so that the square mirror appears to be rectangular. X-rays impinge on the surface of the mirror in the horizontal direction, perpendicular to the torsional flexures. (b) Both the reflected beam and incident beam are recorded on a CCD (charge-coupled device) camera. The reflected beam is a well-defined spot on the area detector indicating the X-rays are reflected from a high-quality smooth mirror surface. (c) A point detector measures the intensity of the reflected beam with respect to incidence angle and shows that reflection efficiency matches well with theory. The abrupt reflectivity drop at θc (≈0.18°) implies a high degree of flatness.
